The three-dimensional reconstruction of a microscopic specimen has been obtained by applying the tomographic algorithm to a set of images acquired in a Scanning Electron Microscope. This result was achieved starting from a series of projections obtained by stepwise rotating the sample under the beam raster. The Scanning Electron Microscope was operated in the scanning-transmission imaging mode, where the intensity of the transmitted electron beam is a monotonic function of the local mass-density and thickness of the specimen. The detection strategy has been implemented and tailored in order to maintain the projection requirement over the large tilt range, as required by the tomographic workflow. A Si-based electron detector and an eucentric-rotation specimen holder have been specifically developed for the purpose.
|Publication status||Published - 23 Jun 2015|
|Event||NANOFORUM 2014 - Rome, Italy|
Duration: 23 Jun 2015 → …
|Period||23/6/15 → …|
All Science Journal Classification (ASJC) codes
- Physics and Astronomy(all)
Morandi, V., Del Marro, M., MacCagnani, P., Masini, L., Migliori, A., Ortolani, L., ... Ferroni, M. (2015). A new apparatus for electron tomography in the Scanning Electron Microscope. Paper presented at NANOFORUM 2014, Rome, Italy. https://doi.org/10.1063/1.4922569