A new apparatus for electron tomography in the Scanning Electron Microscope

V. Morandi, M. Del Marro, P. MacCagnani, L. Masini, A. Migliori, L. Ortolani, G. Pallocca, A. Pezza, M. Rossi, G. Sberveglieri, M. Vittori-Antisari, P. Vinciguerra, M. Ferroni

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Abstract

The three-dimensional reconstruction of a microscopic specimen has been obtained by applying the tomographic algorithm to a set of images acquired in a Scanning Electron Microscope. This result was achieved starting from a series of projections obtained by stepwise rotating the sample under the beam raster. The Scanning Electron Microscope was operated in the scanning-transmission imaging mode, where the intensity of the transmitted electron beam is a monotonic function of the local mass-density and thickness of the specimen. The detection strategy has been implemented and tailored in order to maintain the projection requirement over the large tilt range, as required by the tomographic workflow. A Si-based electron detector and an eucentric-rotation specimen holder have been specifically developed for the purpose.
Original languageEnglish
DOIs
Publication statusPublished - 23 Jun 2015
Externally publishedYes
EventNANOFORUM 2014 - Rome, Italy
Duration: 23 Jun 2015 → …

Conference

ConferenceNANOFORUM 2014
CountryItaly
CityRome
Period23/6/15 → …

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All Science Journal Classification (ASJC) codes

  • Physics and Astronomy(all)

Cite this

Morandi, V., Del Marro, M., MacCagnani, P., Masini, L., Migliori, A., Ortolani, L., ... Ferroni, M. (2015). A new apparatus for electron tomography in the Scanning Electron Microscope. Paper presented at NANOFORUM 2014, Rome, Italy. https://doi.org/10.1063/1.4922569