A very sensitive porous silicon based humidity sensor

G. Di Francia, A. Castaldo, E. Massera, I. Nasti, L. Quercia, I. Rea

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A relative humidity (RH) sensor device based on n-type porous silicon has been designed, fabricated and characterized. The simple device is a diode reverse dc biased, exhibiting an extremely high sensitivity in ambient air and a large operating range (30-70% RH). Aging and NO2interference on the sensor performance have been also investigated. © 2005 Elsevier B.V. All rights reserved.
Original languageEnglish
Pages (from-to)135 - 139
Number of pages5
JournalSensors and Actuators, B: Chemical
Issue numberSUPPL.
Publication statusPublished - 11 Nov 2005


All Science Journal Classification (ASJC) codes

  • Analytical Chemistry
  • Electrochemistry
  • Electrical and Electronic Engineering

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