A relative humidity (RH) sensor device based on n-type porous silicon has been designed, fabricated and characterized. The simple device is a diode reverse dc biased, exhibiting an extremely high sensitivity in ambient air and a large operating range (30-70% RH). Aging and NO2interference on the sensor performance have been also investigated. © 2005 Elsevier B.V. All rights reserved.
All Science Journal Classification (ASJC) codes
- Analytical Chemistry
- Electrical and Electronic Engineering