Assembly of zinc oxide nanostructures by dielectrophoresis for sensing devices

Vera La Ferrara, Aneesh Pacheri Madathil, Anna De Girolamo Del Mauro, Ettore Massera

Research output: Contribution to conferencePaper

Abstract

Net-like nanostructures of ZnO were fabricated on photolithographically patterned Si/SiO2 and glass substrates by dielectrophoresis in ethanol medium. The SEM images show that the pore size of these nanostructures increases with the separation between the electrodes in the patterned substrates. The devices, fabricated starting from various substrates, show responses with variation in the relative humidity level due to the adsorption of water molecules on the surface of the ZnO nanostructures. © 2014 Springer Science+Business Media.
Original languageEnglish
DOIs
Publication statusPublished - 2014
Event1st National Conference on Sensors - , Italy
Duration: 1 Jan 2014 → …

Conference

Conference1st National Conference on Sensors
CountryItaly
Period1/1/14 → …

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All Science Journal Classification (ASJC) codes

  • Industrial and Manufacturing Engineering

Cite this

La Ferrara, V., Madathil, A. P., Del Mauro, A. D. G., & Massera, E. (2014). Assembly of zinc oxide nanostructures by dielectrophoresis for sensing devices. Paper presented at 1st National Conference on Sensors, Italy. https://doi.org/10.1007/978-1-4614-3860-1_46