Back contacted a-Si:H/c-Si heterostructure solar cells

M. Tucci, L. Serenelli, E. Salza, S. De Iuliis, L.J. Geerligs, D. Caputo, M. Ceccarelli, G. de Cesare

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15 Citations (Scopus)


This paper shows how the amorphous/crystalline silicon technology can be implemented in the interdigitated back contact solar cell design. We have fabricated rear-junction, backside contact cells in which both the emitter and the back contact are formed by amorphous/crystalline silicon heterostructure, and the grid-less textured front surface is passivated by a double layer of amorphous silicon and silicon nitride, which also provides an anti-reflection coating. The entire self-aligned mask and photolithography-free process is performed at temperature below 300 °C with the aid of one metallic mask to create the interdigitated pattern. An open circuit voltage of 687 mV has been measured on a 0.5 Ωcm p-type monocrystalline silicon wafer. On the other hand, several technological aspects that limit the fill factor (50%) and the short circuit current density (32 mA/cm2) still need improvement. We show that the uniformity of the deposited amorphous silicon layers is not influenced by the mask-assisted deposition process and that the alignment is feasible. Moreover, this paper investigates the photocurrent limiting factors by one-dimensional modeling and quantum efficiency measurements. © 2008 Elsevier B.V. All rights reserved.
Original languageEnglish
Pages (from-to)2386 - 2391
Number of pages6
JournalJournal of Non-Crystalline Solids
Issue number19-25
Publication statusPublished - 1 May 2008
Externally publishedYes


All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Ceramics and Composites
  • Condensed Matter Physics
  • Materials Chemistry

Cite this

Tucci, M., Serenelli, L., Salza, E., De Iuliis, S., Geerligs, L. J., Caputo, D., ... de Cesare, G. (2008). Back contacted a-Si:H/c-Si heterostructure solar cells. Journal of Non-Crystalline Solids, 354(19-25), 2386 - 2391.