Characterization of electromagnetic fluctuations in a HiPIMS plasma

S. Spagnolo, M. Zuin, R. Cavazzana, E. Martines, A. Patelli, M. Spolaore, M. Colasuonno

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Abstract

A high power impulse magnetron sputtering (HiPIMS) plasma has been characterized by means of Langmuir probes measuring floating potential, electron temperature and density. Moreover, magnetic sensors have been employed in the analysis of the magnetic fluctuations. A low frequency electro-magnetic structure has been detected to propogate in the HiPIMS plasma at a velocity of about 5 km s-1in the direction of the E � B drift. It has been characterized in terms of time and space periodicities for different plasma conditions. It exhibits common features with the so-called rotating spokes, observed in various HiPIMS plasmas. The increasing relevance of the electromagnetic nature of the fluctuating structure at high power levels is highlighted.
Original languageEnglish
Article number065016
Pages (from-to)-
JournalPlasma Sources Science and Technology
Volume25
Issue number6
DOIs
Publication statusPublished - 27 Oct 2016
Externally publishedYes

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All Science Journal Classification (ASJC) codes

  • Condensed Matter Physics

Cite this

Spagnolo, S., Zuin, M., Cavazzana, R., Martines, E., Patelli, A., Spolaore, M., & Colasuonno, M. (2016). Characterization of electromagnetic fluctuations in a HiPIMS plasma. Plasma Sources Science and Technology, 25(6), -. [065016]. https://doi.org/10.1088/0963-0252/25/6/065016