Comparison among XAES, PELS and XPS techniques for evaluation of Sp

J.C. Lascovich, S. Scaglione

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The ratio R of Sp3to Sp2in hydrogenated amorphous carbon (a-C:H) has been evaluated by X-ray Auger electron spectroscopy (XAES), photoelectron energy loss spectroscopy (PELS) and X-ray photoelectron spectroscopy (XPS). Hydrogenated amorphous carbon samples have been deposited by dual ion beam sputtering technique (DIBS). Percentages of Sp2sites are in the range of 45% to 70% for all analyzed samples. Values measured by XAES are about 10% greater than values measured by PELS and the XPS evaluation appears in agreement with them. Besides, R values seem to be influenced not only by hydrogen contents but even by parameters of deposition (i.e. energy of hydrogen ion beam and growth rate). © 1994.
Original languageEnglish
Pages (from-to)17 - 23
Number of pages7
JournalApplied Surface Science
Issue number1
Publication statusPublished - 1 May 1994


All Science Journal Classification (ASJC) codes

  • Surfaces, Coatings and Films

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