An accurate control of the optical properties of single crystal diamond during microfabrication processes such as ion implantation plays a crucial role in the engineering of integrated photonic devices. In this work we present a systematic study of the variation of both real and imaginary parts of the refractive index of single crystal diamondwhen damaged with 2 and 3 MeV protons at low-medium fluences (range: 1015 - 1017 cm-2). After implanting in 125 × 125 μm2 areas with a scanning ion microbeamthe variation of optical pathlength of the implanted regions was measured with laser interferometric microscopywhile their optical transmission was studied using a spectrometric set-up with micrometric spatial resolution. On the basis of a model taking into account the strongly non-uniform damage profile in the bulk samplethe variation of the complex refractive index as a function of damage density was evaluated. © 2012 Optical Society of America.
All Science Journal Classification (ASJC) codes
- Atomic and Molecular Physics, and Optics
Lagomarsino, S., Olivero, P., Calusi, S., Monticone, D. G., Giuntini, L., Massi, M., ... Vannoni, M. (2012). Complex refractive index variation in proton-damaged diamond. Optics Express, 20(17), 19382 - 19394. https://doi.org/10.1364/OE.20.019382