A novel ellipsometer was set up that uses phase-sensitive detection to characterize the state of polarization of the optical radiation. Before reflecting from the sample surface, the incident polarization of the optical beam is altered and modulated by a fixed retarder followed by a second retarder that rotates at frequency vν = ω/2π. After reflection, the beam passes through a linear polarizer and the phases φ2and φ4of the respective 2nd and 4th harmonics of the output signal are measured. The ellipsometric angles Δ and Ψ are fully determined from the values of φ2and φ4over the entire domain (0° < Δ < 360°; 0° < Ψ ≤ 90°). In the reported experiment the retarder was rotating at 20 Hz, which corresponds to a time resolution of 25 ms. The calibration and testing of the phase-sensitive ellipsometer are reported together with its application as an optical diagnostic during the coloration process of electrochromic WO3films. © 1998 Elsevier Science S.A.
All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Surfaces and Interfaces
- Surfaces, Coatings and Films
- Metals and Alloys
- Materials Chemistry
Masetti, E., Segre, S. E., & Bosch, S. (1998). Development of a phase-sensitive ellipsometer and application to the real-time analysis of chromogenic WO. Thin Solid Films, 313-314, 62 - 67. https://doi.org/10.1016/S0040-6090(97)00770-0