Development of a phase-sensitive ellipsometer and application to the real-time analysis of chromogenic WO

E. Masetti, S.E. Segre, S. Bosch

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3 Citations (Scopus)


A novel ellipsometer was set up that uses phase-sensitive detection to characterize the state of polarization of the optical radiation. Before reflecting from the sample surface, the incident polarization of the optical beam is altered and modulated by a fixed retarder followed by a second retarder that rotates at frequency vν = ω/2π. After reflection, the beam passes through a linear polarizer and the phases φ2and φ4of the respective 2nd and 4th harmonics of the output signal are measured. The ellipsometric angles Δ and Ψ are fully determined from the values of φ2and φ4over the entire domain (0° < Δ < 360°; 0° < Ψ ≤ 90°). In the reported experiment the retarder was rotating at 20 Hz, which corresponds to a time resolution of 25 ms. The calibration and testing of the phase-sensitive ellipsometer are reported together with its application as an optical diagnostic during the coloration process of electrochromic WO3films. © 1998 Elsevier Science S.A.
Original languageEnglish
Pages (from-to)62 - 67
Number of pages6
JournalThin Solid Films
Publication statusPublished - 13 Feb 1998
Externally publishedYes


All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry

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