Diamond film-based particle detectors

M. Marinelli, E. Milani, A. Paoletti, A. Tucciarone, G. Verona Rinati, N. Randazzo, R. Potenza, M. Pillon, M. Angelone

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Diamond films grown by microwave plasma enhanced chemical vapor deposition have been investigated as particle detectors for nuclear physics. A CH4-CO2gas mixture was used as gas feed during the growth process. The film morphology, preferential orientation and crystal quality were systematically changed by varying the deposition parameters. In particular, the substrate temperature, Ts, and the CH4concentration in the gas mixture were chosen in the 750-850 °C and 47-50% ranges, respectively. The resulting films were characterized by X-ray diffraction and scanning electron microscopy. The correlation of the above structural properties with the response of the diamond-based detectors was then extensively studied. To this purpose, they were irradiated with a 5.5 MeV241Am alpha particle source under different applied electric fields and their collection lengths and efficiencies were compared. In particular, it was found that the limiting factor in the detector performances is related to intra-grain trapping centers, whose effectiveness is increasingly higher when the sample preferential orientation tends to (100) texturing or moving away from the Si-diamond interface. © 1998 Elsevier Science S.A.
Original languageEnglish
Pages (from-to)519 - 522
Number of pages4
JournalDiamond and Related Materials
Issue number2-5
Publication statusPublished - Feb 1998
Externally publishedYes


All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Chemistry(all)
  • Mechanical Engineering
  • Physics and Astronomy(all)
  • Materials Chemistry
  • Electrical and Electronic Engineering

Cite this

Marinelli, M., Milani, E., Paoletti, A., Tucciarone, A., Verona Rinati, G., Randazzo, N., ... Angelone, M. (1998). Diamond film-based particle detectors. Diamond and Related Materials, 7(2-5), 519 - 522.