The fabrication process of multiple sensing devices on a single Al2O3substrate will be studied step by step aiming to identify the most critical ones to obtain devices with better performances. Steps analysis have been performed by DLS, optical microscopy, two- and four-point probe measurements, and finally testing the device responses towards VOCs. © 2005 Elsevier B.V. All rights reserved.
All Science Journal Classification (ASJC) codes
- Analytical Chemistry
- Electrical and Electronic Engineering
Quercia, L., Loffredo, F., Nasti, M. B. I., & Di Francia, G. (2005). Effects of thin film polymer composite preparation on vapor sensing devices characteristics. Sensors and Actuators, B: Chemical, 111-112(SUPPL.), 166 - 170. https://doi.org/10.1016/j.snb.2005.06.052