Ekwiwalentny model magnetronu napylaja{ogonek}cego z jarzmem magnetycznym

Daniele Desideri, Alvise Maschio, Dan Doru Micu, Olivia Ramona Miron, Monica Spolaore

Research output: Contribution to journalArticle

Abstract

Two magnetron-sputtering devices have been numerically analyzed, experimentally validating the results. It has been inferred that a ferromagnetic yoke is not present in the first device, while the second one has a ferromagnetic yoke. It is shown that either the adding of the yoke, in the first case, or the removal of the yoke, in the second one, has limited effects in the magnetic configuration over the cathode. The same result has been obtained in a dummy case, where a parametric analysis considering devices with different sizes, with and without yoke, has been performed.
Original languageEnglish
Pages (from-to)134 - 137
Number of pages4
JournalPrzeglad Elektrotechniczny
Volume88
Issue number7 B
Publication statusPublished - 2012
Externally publishedYes

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All Science Journal Classification (ASJC) codes

  • Electrical and Electronic Engineering

Cite this

Desideri, D., Maschio, A., Micu, D. D., Miron, O. R., & Spolaore, M. (2012). Ekwiwalentny model magnetronu napylaja{ogonek}cego z jarzmem magnetycznym. Przeglad Elektrotechniczny, 88(7 B), 134 - 137.