Ellipsometric methods for absorbing layers: A modified downhill simplex algorithm

S. Bosch, F. Monzonís, E. Masetti

Research output: Contribution to journalArticle

19 Citations (Scopus)

Abstract

A modified downhill simplex algorithm for single wavelength ellipsometry is presented. The algorithm finds the best-fitting solution (n, k, d) for a sample consisting of a single absorbing layer when ellipsometric data corresponding to different incidence angles (at least two) are available. The method is easy to be implemented numerically and gives i) very good convergence properties and ii) simple adaptability to different practical situations, such as those in which there are more than two angles of incidence or those in which several independent measurements have been made of the same incident angle.
Original languageEnglish
Pages (from-to)54 - 58
Number of pages5
JournalThin Solid Films
Volume289
Issue number1-2
DOIs
Publication statusPublished - 30 Nov 1996
Externally publishedYes

    Fingerprint

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry

Cite this