ENEA EUV discharge produced plasma source: Diagnostics, characterization and applications

Research output: Contribution to conferencePaper

Abstract

Extreme Ultraviolet (EUV) radiation (photon energy hn = 20-284eV, wavelength λ ≃ 4:4-62nm) can be used to efficiently modify the structure of photonic materials, photoresists etc. In fact, the EUV short wavelength, its short penetration length in matter (typically few tens of nm) and the availability of high-reflectivity (≥ 70% at λ = 13-15nm) normal-incidence multilayer mirrors allow high-spatial-resolution patterning on the aforementioned materials. This is leading to the development of the next generation lithography for micro-electronics. Consequently, EUV sources are a main object of study and they are largely exploited for metrology and tests on mirrors, innovative materials etc. Excluding large facilities like synchrotron machines, plasma sources are needed to efficiently generate EUV radiation. An EUV discharge produced plasma source is operating at the ENEA Frascati Research Centre. The source characterization by means of various diagnostic tools will be reported after a brief description of its principle of operation. Finally, some source applications involving the treatment of both photonic materials and innovative photoresists will be illustrated.
Original languageEnglish
Publication statusPublished - 2015
Externally publishedYes
Event1st EPS Conference on Plasma Diagnostics, ECPD 2015 - Frascati, Italy
Duration: 1 Jan 2015 → …

Conference

Conference1st EPS Conference on Plasma Diagnostics, ECPD 2015
CountryItaly
CityFrascati
Period1/1/15 → …

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Cite this

Mezi, L., Bollanti, S., Flora, F., & Torre, A. (2015). ENEA EUV discharge produced plasma source: Diagnostics, characterization and applications. Paper presented at 1st EPS Conference on Plasma Diagnostics, ECPD 2015, Frascati, Italy.