Fabrication and characterization of a sensing device based on porous silicon

L. Quercia, F. Cerullo, V. La Ferrara, G. Di Francia, C. Baratto, G. Faglia

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In this work we have fabricated a simple gas-sensing device based on porous silicon. Starting from the well-known porous silicon photoluminescence quenching due to oxygen, we have optimized the material and the device design, obtaining a reversible and stable O2 gas sensor. A simple and cheap detector of air leaks in inert environment is of great interest for the alimentary industry. Full characterization of the device has been carried out in a gas sensor calibration apparatus, showing even a promising sensitivity at room temperature to a toxic gas like NO2.
Original languageEnglish
Pages (from-to)473 - 477
Number of pages5
JournalPhysica Status Solidi (A) Applied Research
Issue number1
Publication statusPublished - Nov 2000


All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics

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