Fast collisional capillary discharge source for soft x-ray production and applications

G. Tomassetti, L. Palladino, A. Ritucci, L. Reale, T. Limongi, S.V. Kukhlevsky, J. Kaiser, F. Flora, L. Mezi

Research output: Contribution to journalArticle

Abstract

We report on a fast soft x-ray source consisting in a high temperature small diameter (4 mm) plasma column produced by electric discharge in a ceramic capillary. This source was developed to produce pulses of few hundred nanosecond duration for EUV lithography, x ray microscopy applications and also with the aim of developing a soft x ray amplifier. We obtained experimental results concerning the intensity and spectral analysis of the emitted x radiation pumped by a 30-40 kA, 100-200 ns, electric discharge at 1 Torr pressure in Ar gas. We refer also on the spectra obtained using CO2, as plasma medium, after the optimization of the discharge setup and electrical parameters. © Society of Photo-Optical Instrumentation Engineers.
Original languageEnglish
Pages (from-to)151 - 158
Number of pages8
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume4504
DOIs
Publication statusPublished - 2001
Externally publishedYes

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All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

Cite this

Tomassetti, G., Palladino, L., Ritucci, A., Reale, L., Limongi, T., Kukhlevsky, S. V., ... Mezi, L. (2001). Fast collisional capillary discharge source for soft x-ray production and applications. Proceedings of SPIE - The International Society for Optical Engineering, 4504, 151 - 158. https://doi.org/10.1117/12.448460