Fast infrared light modulation in a-Si:H micro-devices for fiber-to-the-home applications

G. Cocorullo, F.G. Della Corte, R. De Rosa, I. Rendina, A. Rubino, E. Terzini

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We have produced and measured the properties of a fast switching micro-optic device in a rib-like configuration working at the 1.3 and 1.55 μm fiber communication wavelengths for fiber-to-the-home applications. The core guiding layer is made of intrinsic hydrogenated amorphous silicon (a-Si:H) deposited by plasma enhanced chemical vapour deposition (PECVD) with absorption coefficients sufficiently small at the wavelength of interest. The signal modulation is performed exploiting the thermo-optic effect of thin film a-Si:H in a Fabry-Perot waveguide integrated interferometer. Switching times <10 μs have been obtained with two different types of cladding layer. © 2000 Published by Elsevier Science B.V. All rights reserved.
Original languageEnglish
Pages (from-to)1247 - 1251
Number of pages5
JournalJournal of Non-Crystalline Solids
Volume266-269 B
Publication statusPublished - 1 May 2000
Externally publishedYes


All Science Journal Classification (ASJC) codes

  • Ceramics and Composites
  • Electronic, Optical and Magnetic Materials

Cite this

Cocorullo, G., Della Corte, F. G., De Rosa, R., Rendina, I., Rubino, A., & Terzini, E. (2000). Fast infrared light modulation in a-Si:H micro-devices for fiber-to-the-home applications. Journal of Non-Crystalline Solids, 266-269 B, 1247 - 1251.