High power KrF laser with a phase-unifying unstable cavity

G. De Nunzio, M.R. Perrone, C. Panzera, D. Flori, A. Piegari, S. Scaglione

Research output: Contribution to journalArticle

7 Citations (Scopus)


The performance of a 0.45 J KrF excimer laser with an unstable cavity using a phase-unifying mirror as an output coupler is described. The output beam having a cross section of 2.4×1.2 cm2exhibits a smooth far field profile with 86.5% of the total near field energy contained within a far-field full angle θ≤0.05 mrad. The measurements for determining the beam quality factor M2and the beam angular stability are also reported. © 1997 American Institute of Physics.
Original languageEnglish
Pages (from-to)3782 - 3784
Number of pages3
JournalApplied Physics Letters
Issue number26
Publication statusPublished - 29 Dec 1997


All Science Journal Classification (ASJC) codes

  • Physics and Astronomy (miscellaneous)

Cite this