The performance of a 0.45 J KrF excimer laser with an unstable cavity using a phase-unifying mirror as an output coupler is described. The output beam having a cross section of 2.4×1.2 cm2exhibits a smooth far field profile with 86.5% of the total near field energy contained within a far-field full angle θ≤0.05 mrad. The measurements for determining the beam quality factor M2and the beam angular stability are also reported. © 1997 American Institute of Physics.
All Science Journal Classification (ASJC) codes
- Physics and Astronomy (miscellaneous)
De Nunzio, G., Perrone, M. R., Panzera, C., Flori, D., Piegari, A., & Scaglione, S. (1997). High power KrF laser with a phase-unifying unstable cavity. Applied Physics Letters, 71(26), 3782 - 3784. https://doi.org/10.1063/1.120504