High-precision measurement of optical constants of ultra-thin coating using surface plasmon resonance spectroscopic ellipsometry in Otto-Bliokh configuration

Guohang Hu, Hongbo He, Anna Sytchkova, Jiaoling Zhao, Jianda Shao, Marialuisa Grilli, Angela Piegari

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11 Citations (Scopus)

Abstract

In this paper, a surface plasmon resonance (SPR) spectroscopic ellipsometry, based on Otto-Bliokh configuration, is developed for the measurement of thickness and optical constants of ultra-thin coatings. This technique combines sensitivity of surface plasmon with accessibility of optical constants and other advantages of ellipsometry. Surface plasmons (SP) are generated in the sample under test in total reflectance mode and SP geometric distribution over the sample surface is influenced by the coating thickness and optical properties on one hand, and by the air gap thickness on the other hand. Nanoscale control of the thickness of the air gap between a convex surface and the sample was assured using a micron-size beam spot irradiating the contact zone. The amplitude and phase change induced by SPR in the visible and near-infrared spectral range were obtained to determine the dispersion of optical constants and the thickness of the ultra-thin layer. The extracted optical constants were found to be in excellent agreement with the results obtained using TEM and XRR techniques. Both theoretical analysis and experimental results demonstrated high sensitivity and precision of the proposed technique for the analysis of coatings of both metals and dielectrics on metals.
Original languageEnglish
Pages (from-to)13425 - 14434
Number of pages1010
JournalOptics Express
Volume25
Issue number12
DOIs
Publication statusPublished - 12 Jun 2017

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All Science Journal Classification (ASJC) codes

  • Atomic and Molecular Physics, and Optics

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