Influence of nitrogen and temperature on the plasma deposition of fluorinated amorphous carbon films

L. Valentini, J.M. Kenny, R.M. Montereali, L. Lozzi, S. Santucci

Research output: Contribution to journalArticle

6 Citations (Scopus)
Original languageEnglish
Pages (from-to)1210 - 1215
Number of pages6
JournalJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Issue number4
Publication statusPublished - Jul 2002
Externally publishedYes

All Science Journal Classification (ASJC) codes

  • Surfaces, Coatings and Films
  • Surfaces and Interfaces
  • Physics and Astronomy (miscellaneous)

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