Investigation of the surface micro-roughness of fluoride films by spectroscopic ellipsometry

A.V. Tikhonravov, M.K. Trubetskov, A.V. Krasilnikova, E. Masetti, A. Duparré, E. Quesnel, D. Ristau

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Abstract

Spectroscopic ellipsometry is a sensitive and reliable diagnostic tool for the optical properties of thin films and multi-layer coatings. In this paper we have derived new formulas permitting qualitative and quantitative analysis of the surface micro-roughness in the case where the refractive index of the film is close to that of the substrate. Theoretical results are applied to the developing of experimental data for lanthanum fluoride and magnesium fluoride thin films. © 2001 Elsevier Science B.V. All rights reserved.
Original languageEnglish
Pages (from-to)229 - 237
Number of pages9
JournalThin Solid Films
Volume397
Issue number1-2
DOIs
Publication statusPublished - 1 Nov 2001
Externally publishedYes

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All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry

Cite this

Tikhonravov, A. V., Trubetskov, M. K., Krasilnikova, A. V., Masetti, E., Duparré, A., Quesnel, E., & Ristau, D. (2001). Investigation of the surface micro-roughness of fluoride films by spectroscopic ellipsometry. Thin Solid Films, 397(1-2), 229 - 237. https://doi.org/10.1016/S0040-6090(01)01421-3