Ion assistance effects on electron beam deposited MgF

M. Alvisi, F. De Tomasi, A. Della Patria, M. Di Giulio, E. Masetti, M.R. Perrone, M.L. Protopapa, A. Tepore

Research output: Contribution to journalArticle

12 Citations (Scopus)
Original languageEnglish
Pages (from-to)714 - 720
Number of pages7
JournalJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume20
Issue number3
DOIs
Publication statusPublished - May 2002
Externally publishedYes

All Science Journal Classification (ASJC) codes

  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

Cite this

Alvisi, M., De Tomasi, F., Della Patria, A., Di Giulio, M., Masetti, E., Perrone, M. R., ... Tepore, A. (2002). Ion assistance effects on electron beam deposited MgF. Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, 20(3), 714 - 720. https://doi.org/10.1116/1.1464836