Laser damage resistance of thin films for ultraviolet optical components

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The laser induced damage in optical coatings plays a limiting role in the laser reliability. Either the laser cavity mirrors and the optical components employed outside the cavity are often damaged by the laser radiation delivered by high power lasers. Their resistance becomes more critical at shorter wavelengths, therefore the research is focused on the ultraviolet region where excimer lasers are finding many applications. Laser damage studies were performed at 248 nm (KrF laser) and 308 nm (XeCl laser) on MgF2, HfO2and SiO2single films and multilayer coatings. Results about the dependence of damage threshold on both the deposition technique and the standing-wave electric field profile inside the coating, are reported. © 2001 SPIE.
Original languageEnglish
Pages (from-to)869 - 881
Number of pages13
JournalProceedings of SPIE - The International Society for Optical Engineering
Issue number1
Publication statusPublished - 29 Jun 2001


All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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