Laser-induced breakdown spectroscopy as a diagnostic tool for thin films elemental composition

L. Caneve, F. Colao, F. Sarto, V. Spizzichino, M. Vadrucci

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The use of laser induced breakdown spectroscopy (LIBS) as a possible diagnostic tool for thin films elemental composition has been investigated. For this kind of application, LIBS can be advantageous with respect to other conventional techniques of analysis routinely used to determine thin films stoichiometry. LIBS was applied to ferromagnetic thin films of FeHfO in which the electric and magnetic properties are strictly correlated to the stoichiometry. The influence of the laser parameters on the ablation process of a thin film on a substrate has been investigated, together with a study of different substrates in order to identify the film-substrate coupling that would make the LIBS technique applicable also to films whose thickness is less than the laser ablation depth. Finally, the possibility of obtaining semi-quantitative data from the analysis of FeHfO thin films using the evaluated Fe/Hf atomic ratio was investigated. © 2005 Elsevier B.V. All rights reserved.
Original languageEnglish
Pages (from-to)1098 - 1102
Number of pages5
JournalSpectrochimica Acta, Part B: Atomic Spectroscopy
Issue number7-8
Publication statusPublished - 31 Aug 2005
Externally publishedYes


All Science Journal Classification (ASJC) codes

  • Analytical Chemistry
  • Atomic and Molecular Physics, and Optics
  • Instrumentation
  • Spectroscopy

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