Metal-functionalized and vertically-aligned multiwalled carbon nanotube layers for low temperature gas sensing applications

M. Penza, R. Rossi, M. Alvisi, M.A. Signore, G. Cassano, R. Pentassuglia, D. Suriano, V. Pfister, E. Serra

Research output: Contribution to conferencePaper

Abstract

Vertically-aligned carbon nanotubes (CNTs) films have been grown by radiofrequency plasma-enhanced chemical vapor deposition system onto alumina substrates, coated with 2.5 nm thick Fe catalyst, for NO2, H2and C2H5OH gas sensing applications, at sensor temperatures from room-temperature to 150°C. The CNTs appear in the form of forest-like structure. Nanoclusters of noble metals with nominal thickness of 5 nm of Pt, Ru and Ag have been sputtered on the top-surface of the vertically-aligned CNTs layers to enhance the gas sensitivity. It was demonstrated that the gas sensitivity of the metal modified CNTs-sensors significantly improved by a factor up to an order of magnitude through a spillover effect, and a broader selectivity was provided. The gas sensing properties of the CNTs-sensors, including the metal-modified CNTs, are characterized by a change of the electrical conductivity in a model of the charge transfer with a semiconducting p-type character. The metal-functionalized CNTs-sensors exhibit high sensitivity, fast response, reversibility, good repeatability, sub-ppm range detection limit. A practical application of the CNTs-sensors for monitoring landfill gas is presented. © 2010 Springer Science+Business Media B.V.
Original languageEnglish
DOIs
Publication statusPublished - 2010
Externally publishedYes
Event14th Italian Conference on Sensors and Microsystems, AISEM 2009 - , Italy
Duration: 1 Jan 2010 → …

Conference

Conference14th Italian Conference on Sensors and Microsystems, AISEM 2009
CountryItaly
Period1/1/10 → …

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All Science Journal Classification (ASJC) codes

  • Industrial and Manufacturing Engineering

Cite this

Penza, M., Rossi, R., Alvisi, M., Signore, M. A., Cassano, G., Pentassuglia, R., ... Serra, E. (2010). Metal-functionalized and vertically-aligned multiwalled carbon nanotube layers for low temperature gas sensing applications. Paper presented at 14th Italian Conference on Sensors and Microsystems, AISEM 2009, Italy. https://doi.org/10.1007/978-90-481-3606-3_35