Micro-beam and pulsed laser beam techniques for the micro-fabrication of diamond surface and bulk structures

S. Sciortino, M. Bellini, F. Bosia, S. Calusi, C. Corsi, C. Czelusniak, N. Gelli, L. Giuntini, F. Gorelli, S. Lagomarsino, P.A. Mandò, M. Massi, P. Olivero, G. Parrini, M. Santoro, A. Sordini, A. Sytchkova, F. Taccetti, M. Vannoni

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Abstract

Micro-fabrication in diamond is applicable in a wide set of emerging technologies, exploiting the exceptional characteristics of diamond for application in bio-physics, photonics and radiation detection. Micro ion-beam irradiation and pulsed laser irradiation are complementary techniques, which permit the implementation of complex geometries, by modification and functionalization of surface and/or bulk material, modifying the optical, electrical and mechanical characteristics of the material. In this article we summarize the work done in Florence (Italy), concerning ion beam and pulsed laser beam micro-fabrication in diamond.
Original languageEnglish
Pages (from-to)191 - 198
Number of pages8
JournalNuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
Volume348
DOIs
Publication statusPublished - 2015

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All Science Journal Classification (ASJC) codes

  • Nuclear and High Energy Physics
  • Instrumentation

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