Microlithographic techniques for laser assisted fabrication of bioelectronic devices

E. Di Fabrizio, M. Gentili, P. Morales, R. Pilloton, J. Mela, S. Santucci, A. Sese

Research output: Contribution to journalArticle

9 Citations (Scopus)

Abstract

Microlithographic techniques are described for the fabrication of removable stencils to be used in micropatterning by laser deposition of organic and biological matter. Patterned layers are shown together with same atomic force microscope preliminary characterization. Also, a lithographically fabricated micron size glucose biosenser is shown, together with first assays of its performance. © 1996 American Institute of Physics.
Original languageEnglish
Pages (from-to)3280 - 3282
Number of pages3
JournalApplied Physics Letters
Volume69
Issue number21
DOIs
Publication statusPublished - 18 Nov 1996
Externally publishedYes

    Fingerprint

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy (miscellaneous)

Cite this

Di Fabrizio, E., Gentili, M., Morales, P., Pilloton, R., Mela, J., Santucci, S., & Sese, A. (1996). Microlithographic techniques for laser assisted fabrication of bioelectronic devices. Applied Physics Letters, 69(21), 3280 - 3282. https://doi.org/10.1063/1.117310