The paper introduces a 3D analytical model to calculate the ablation rate induced by a laser pulse on a semi-infinite slab of material of finite thickness. The model concerns first the thermal field induced by irradiation in order that the ablation process fulfills some prefixed boundary conditions, then the fluence of the laser pulse is calculated by consequence. Inputs of the problem are therefore the properties of the ablation process such as drilling width and depth, sputter rate, and so on. Some examples of computer simulation are carried out to show the outputs of the model, in particular as concerns the correlation between shape of the ablated zone and space and time profile of laser pulse. The influence of thickness on the aspect ratio (width/depth) of the hole is discussed by comparing the surface and in-depth propagation rates of the ablation boundary. The results show that the present model enables one to describe a wide variety of ablation processes with aspect ratios ranging from values of the order of some tens, typical for instance of surface cleaning, etching or deoxidation treatments, down to values of the order of 0.05, typical of hole drilling.
|Pages (from-to)||439 - 446|
|Number of pages||8|
|Journal||Applied Physics A: Materials Science and Processing|
|Publication status||Published - Apr 1999|
All Science Journal Classification (ASJC) codes
- Materials Science(all)