Nanometer biodevice fabrication by electron beam lithography

Enzo Di Fabrizio, Luca Grella, Marco Baciocchi, Massimo Gentili, Cesare Ascoli, Brunero Cappella, Carlo Frediani, Piero Morales

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Abstract

A conventional electron beam lithography machine operated at 50 kV is used in this work to fabricate devices and structures for biophysical and molecular electronics applications featuring critical dimensions down to the nanometer region. Such nanostructures are used for deposition and manipulation of organic molecules; fabricated devices include fine pitch self-standing meshes for laser deposition of molecules, a bimetallic miniaturized glucose sensor and nanogaps for molecular trapping and probing. The developed process is described in detail and by means of Monte Carlo simulation, the various electron scattering processes are modelled. Critical issues, such as fabrication of nanogaps with dimension down to 5 nm, are also addressed. © 1997 American Vacuum Society.
Original languageEnglish
Pages (from-to)2892 - 2896
Number of pages5
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume15
Issue number6
Publication statusPublished - Nov 1997
Externally publishedYes

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All Science Journal Classification (ASJC) codes

  • Electrical and Electronic Engineering
  • Physics and Astronomy (miscellaneous)
  • Surfaces and Interfaces

Cite this

Di Fabrizio, E., Grella, L., Baciocchi, M., Gentili, M., Ascoli, C., Cappella, B., ... Morales, P. (1997). Nanometer biodevice fabrication by electron beam lithography. Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, 15(6), 2892 - 2896.