Nanopatterned platinum electrodes by focused ion beam in single palladium nanowire based devices

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Abstract

In this paper we present different devices, working as hydrogen sensors, based on single palladium nanowire and realized combining focused ion beam and dielectrophoresis techniques. The combination of these two techniques consists in the employ of focused ion beam for electrode patterning onto silicon/silicon dioxide substrates, followed by the assembly of a single palladium nanowire applying between electrodes an electric field at fixed frequency (dielectrophoresis) to a palladium nanoparticles solution. The nanowire morphology can be branched or not, depending on the applied frequency value. The devices are characterized in hydrogen environment at room temperature and their responses are compared. © 2011 Elsevier B.V. All rights reserved.
Original languageEnglish
Pages (from-to)3261 - 3266
Number of pages6
JournalMicroelectronic Engineering
Volume88
Issue number11
DOIs
Publication statusPublished - Nov 2011

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All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Electrical and Electronic Engineering

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