In this paper we present different devices, working as hydrogen sensors, based on single palladium nanowire and realized combining focused ion beam and dielectrophoresis techniques. The combination of these two techniques consists in the employ of focused ion beam for electrode patterning onto silicon/silicon dioxide substrates, followed by the assembly of a single palladium nanowire applying between electrodes an electric field at fixed frequency (dielectrophoresis) to a palladium nanoparticles solution. The nanowire morphology can be branched or not, depending on the applied frequency value. The devices are characterized in hydrogen environment at room temperature and their responses are compared. © 2011 Elsevier B.V. All rights reserved.
All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Atomic and Molecular Physics, and Optics
- Condensed Matter Physics
- Surfaces, Coatings and Films
- Electrical and Electronic Engineering