On the structural and optical properties of ZnO nanoparticles formed in silica by ion implantation

Maria Antonella Tagliente, Marcello Massaro, Giovanni Mattei, Paolo Mazzoldi, Giovanni Pellegrini, Valentina Bello, Daniela Carbone

Research output: Contribution to conferencePaper


Zinc-oxide nanoparticles embedded in silica glass were fabricated by ion implantation of Zn+ions of 130 keV and up to a dose of 2×1017ions/cm2, followed by thermal annealing in O2atmosphere at 800°C and for 1h. Glancing-incidence x-ray diffraction and transmission electron microscopy results show zinc crystalline nanoclusters with an average diameter of 13nm and placed around a Rp=70nm, in the as-implanted sample. The thermal oxidation promotes the diffusion of the Zn atoms preferentially towards the surface of the silica where ZnO particles of 65nm in diameter where found and a small diffusion toward the bulk where ZnO clusters of 5nm in diameter were observed. A relatively strong exciton emission peak from the ZnO particles was observed in the photo-luminescence spectrum at 380nm. © 2006 Materials Research Society.
Original languageEnglish
Publication statusPublished - 2006
Externally publishedYes
Event2006 MRS Spring Meeting - , United States
Duration: 1 Jan 2006 → …


Conference2006 MRS Spring Meeting
CountryUnited States
Period1/1/06 → …


All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

Cite this

Tagliente, M. A., Massaro, M., Mattei, G., Mazzoldi, P., Pellegrini, G., Bello, V., & Carbone, D. (2006). On the structural and optical properties of ZnO nanoparticles formed in silica by ion implantation. Paper presented at 2006 MRS Spring Meeting, United States.