Optical and electrical properties of TiO

M.L. Grilli, A. Sytchkova, M.R. Mancini, F. Zurlo, G. Hu, E. Di Bartolomeo, A. Piegari

Research output: Contribution to conferencePaper

Abstract

Conductive non stoichiometric TiO2-based films attract considerable interest for their photocatalytic, photovoltaic and photoelectrochemical applications. In this work, transparent and conductive TiOx and TiO2:Nb films were fabricated by e-beam evaporation at 250°C in oxygen deficient atmosphere starting from commercial powders, while TiO2:Nb films and TiO2:Nb/Ti multilayer systems were grown at room temperature by radio frequency sputtering in Ar atmosphere starting from TiO2:Nb and Ti targets. In all cases, an accurate control of oxygen partial pressure during the growth process was necessary and, in some cases, additional post deposition treatments in reducing atmosphere were applied aiming to decrease the electrical resistivity of the samples. The optical, electrical, structural and morphological characteristics of the different films were investigated and correlated to the process parameters.
Original languageEnglish
Publication statusPublished - 2016
Event18th Italian National Conference on Photonic Technologies, Fotonica 2016 - Rome, Italy
Duration: 1 Jan 2016 → …

Conference

Conference18th Italian National Conference on Photonic Technologies, Fotonica 2016
CountryItaly
CityRome
Period1/1/16 → …

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All Science Journal Classification (ASJC) codes

  • Electrical and Electronic Engineering

Cite this

Grilli, M. L., Sytchkova, A., Mancini, M. R., Zurlo, F., Hu, G., Di Bartolomeo, E., & Piegari, A. (2016). Optical and electrical properties of TiO. Paper presented at 18th Italian National Conference on Photonic Technologies, Fotonica 2016, Rome, Italy.