Optical and mechanical properties of diamond like carbon produced by dual ion beam sputtering technique

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Abstract

The diamond like carbon (DLC) is very hard, inert to chemical attack and transparent in the IR region. In order to increase the transparency of DLC, the percentage of Sp3 bonds must be increased. In this work, thin film of DLC were deposited by the Dual Ion Beam Sputtering technique. An argon ion beam sputters a graphite target and a second one assists the film during the growth. A set of samples were produced at different momentum transfer varying the energy and current density of assisting ion beam and the growth rate. The momentum transfer is defined as P = nc/nat·√2·mc·Ec where nc is the number of recoiling carbon atoms, mat is the number of the carbon atoms in the volume interested at the collision cascade process and Ec is the energy of the recoils after the collision with the Ar ions. nc, nat and Ec were calculated by the TRIM program. The optical properties as the optical gap (E04) of the samples were related to the momentum transfer value. As far as the mechanical properties were concerned, the hardness value was measured by Knoop microindentation for all samples.
Original languageEnglish
Pages (from-to)58 - 65
Number of pages8
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume3738
Publication statusPublished - 1999

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All Science Journal Classification (ASJC) codes

  • Electrical and Electronic Engineering
  • Condensed Matter Physics

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