Organotin films deposited by laser-induced CVD as active layers in chemical gas sensors

R. Larciprete, E. Borsella, P. De Padova, P. Perfetti, G. Faglia, G. Sberveglieri

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In this work, an organotin film obtained by L-CVD at 193 nm from tetramethyltin was used as active layer in a conductometric gas sensor. As it was stated by in situ surface analysis, the 'as deposited' material contained Sn and C. However, exposure to a large dose of O2or air determined the formation of a thin SnO2layer covering the remaining film, which was less oxidised and had an oxygen concentration gradient in its depth. Electrical tests of the sensors showed high sensitivity and short response time for the detection of NO2. Satisfactory performances were observed also with reducing gases. In this case, the high sensitivity measured for H2and ethanol, in comparison to CO and hydrocarbons, indicated the possibility to use the sensor for selective revelation. © 1998 Elsevier Science S.A. All rights reserved.
Original languageEnglish
Pages (from-to)291 - 295
Number of pages5
JournalThin Solid Films
Issue number1-2
Publication statusPublished - 22 Jun 1998
Externally publishedYes


All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry

Cite this

Larciprete, R., Borsella, E., De Padova, P., Perfetti, P., Faglia, G., & Sberveglieri, G. (1998). Organotin films deposited by laser-induced CVD as active layers in chemical gas sensors. Thin Solid Films, 323(1-2), 291 - 295.