Palladium nanowires assembly by dielectrophoresis investigated as hydrogen sensors

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Abstract

Fabrication of hydrogen sensors based on array of palladium nanowires onto silicon substrate with interdigitated electrodes is reported. Two series of devices, where Pd-sensing elements are assembled by dielectrophoresis, are fabricated and electrically characterized under 4% hydrogen at room temperature. Their electrical responses are analyzed and compared to investigate the effect of nanowire thickness and surface morphology on sensitivity and response time. We have found thinner nanowires are more sensitive and their response time is shorter than thicker ones. © 2006 IEEE.
Original languageEnglish
Article number4531755
Pages (from-to)776 - 781
Number of pages6
JournalIEEE Transactions on Nanotechnology
Volume7
Issue number6
DOIs
Publication statusPublished - Nov 2008

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All Science Journal Classification (ASJC) codes

  • Computer Science Applications
  • Electrical and Electronic Engineering

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