Parametrization of optical properties of indium-tin-oxide thin films by spectroscopic ellipsometry: Substrate interfacial reactivity

M. Losurdo, M. Giangregorio, P. Capezzuto, G. Bruno, R. De Rosa, F. Roca, C. Summonte, J. Plá, R. Rizzoli

Research output: Contribution to journalArticle

57 Citations (Scopus)
Original languageEnglish
Pages (from-to)37 - 42
Number of pages6
JournalJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume20
Issue number1
DOIs
Publication statusPublished - Jan 2002

All Science Journal Classification (ASJC) codes

  • Surfaces, Coatings and Films
  • Surfaces and Interfaces
  • Physics and Astronomy (miscellaneous)

Cite this