Piezoelectric thin films of ZnO-nanorods/nanowalls grown by chemical bath deposition

Marco Fortunato, Chandrakanth Reddy Chandraiahgari, Giovanni De Bellis, Paolo Ballirano, Peiman Soltani, Saulius Kaciulis, Luisa Caneve, Francesca Sarto, Maria Sabrina Sarto

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This study presents a comparison of the piezoelectric properties of nanostructured thin films made of arrays of vertically oriented ZnO-nanorods (ZnO-NRs) over ITO-glass substrate and of ZnO-nanowalls (ZnO-NWs) over aluminium substrate. Both nanostructures were synthesized on a large area through chemical bath deposition. The morphological, structural, and chemical characteristics of the produced nanostructures were investigated in order to assess the crystal quality and purity. To this purpose, we used different techniques, such as field-emission scanning electron microscopy, atomic force microscopy, energy dispersive x-ray analysis, powder x-ray diffraction, x-ray photoelectron spectroscopy, and photoluminescence spectroscopy. Moreover, the piezoelectric response of the nanostructured films was assessed through piezoresponse force microscopy. This technique was employed to obtain a quantitative evaluation of the piezoelectric coefficient (33of the film. We obtained33values as high as (7.01 ± 0.33) pm/V for ZnO-NRs and (2.63 ± 0.49) pm/V for ZnO-NWs films.
Original languageEnglish
Pages (from-to)311 - 319
Number of pages9
JournalIEEE Transactions on Nanotechnology
Issue number2
Publication statusPublished - 1 Mar 2018
Externally publishedYes


All Science Journal Classification (ASJC) codes

  • Computer Science Applications
  • Electrical and Electronic Engineering

Cite this

Fortunato, M., Chandraiahgari, C. R., De Bellis, G., Ballirano, P., Soltani, P., Kaciulis, S., Caneve, L., Sarto, F., & Sarto, M. S. (2018). Piezoelectric thin films of ZnO-nanorods/nanowalls grown by chemical bath deposition. IEEE Transactions on Nanotechnology, 17(2), 311 - 319. https://doi.org/10.1109/TNANO.2018.2800406