Refractive index measurement in TCO layers for micro optoelectronic devices

S. Daliento, P. Guerriero, M. Addonizio, A. Antonaia, E. Gambale

Research output: Contribution to conferencePaper

Abstract

The operation of micro-optoelectronic devices relies on optical properties of materials, first of all the wavelength dependent refractive index. Standard measurement techniques are often prone to significant ambiguities caused by the periodic nature of the optical response. In this paper we propose a procedure which exploits transmittance measurements, performed at variable light incidence angle, to reconstruct the complex refractive index as a function of the wavelength. Experiments performed on a thin TCO layer prove the reliability of the method. © 2014 IEEE.
Original languageEnglish
DOIs
Publication statusPublished - 2014
Event2014 29th International Conference on Microelectronics, MIEL 2014 - , Serbia
Duration: 1 Jan 2014 → …

Conference

Conference2014 29th International Conference on Microelectronics, MIEL 2014
CountrySerbia
Period1/1/14 → …

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All Science Journal Classification (ASJC) codes

  • Electrical and Electronic Engineering

Cite this

Daliento, S., Guerriero, P., Addonizio, M., Antonaia, A., & Gambale, E. (2014). Refractive index measurement in TCO layers for micro optoelectronic devices. Paper presented at 2014 29th International Conference on Microelectronics, MIEL 2014, Serbia. https://doi.org/10.1109/MIEL.2014.6842138