Single palladium nanowire growth in place assisted by dielectrophoresis and focused ion beam

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Abstract

Here we report, for the first time, on the combined use of Focused Ion Beam and Dielectrophoresis techniques for the fabrication of a nanodevice whose operating mechanism relies on a single palladium nanowire. Focused Ion Beam is used to deposit, without photolithographic masks, platinum microelectrodes on a silicon/silicon nitride substrate. Dielectrophoresis is employed for assembling the palladium nanowire, starting from a saturated palladium particles solution, and precisely positioning it between the nanocontacts. The nanodevice works as a hydrogen sensor, confirming the reliability of technology. Its electrical response has been recorded, at room temperature, in a dynamic environment, where different hydrogen concentrations, from 0.1% to 4% in dry air, have been introduced. Its sensitivity, towards 0.1% to 1% gas concentrations in dry air, has been calculated, too. Copyright © 2009 American Scientific Publishers All rights reserved.
Original languageEnglish
Pages (from-to)2931 - 2936
Number of pages6
JournalJournal of Nanoscience and Nanotechnology
Volume9
Issue number5
DOIs
Publication statusPublished - May 2009

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All Science Journal Classification (ASJC) codes

  • Condensed Matter Physics
  • Chemistry(all)
  • Materials Science(all)
  • Bioengineering
  • Biomedical Engineering

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