Here we report, for the first time, on the combined use of Focused Ion Beam and Dielectrophoresis techniques for the fabrication of a nanodevice whose operating mechanism relies on a single palladium nanowire. Focused Ion Beam is used to deposit, without photolithographic masks, platinum microelectrodes on a silicon/silicon nitride substrate. Dielectrophoresis is employed for assembling the palladium nanowire, starting from a saturated palladium particles solution, and precisely positioning it between the nanocontacts. The nanodevice works as a hydrogen sensor, confirming the reliability of technology. Its electrical response has been recorded, at room temperature, in a dynamic environment, where different hydrogen concentrations, from 0.1% to 4% in dry air, have been introduced. Its sensitivity, towards 0.1% to 1% gas concentrations in dry air, has been calculated, too. Copyright © 2009 American Scientific Publishers All rights reserved.
All Science Journal Classification (ASJC) codes
- Condensed Matter Physics
- Materials Science(all)
- Biomedical Engineering