Soft X-ray plasma source pumped by an excimer laser: Optimization and applications

Patrizia Albertano, Mauro Belli, Sarah Bollanti, Paolo Di Lazzaro, Anatoly Ya Faenov, Francesco Flora, Gualtiero Giordano, Antonio Grilli, Fiorenza Ianzini, Sergei V. Kukhlevsky, Tommaso Letardi, Alessandro Marinai, Alessandro Nottola, Libero Palladino, Tatiana Pikuz

Research output: Contribution to journalArticle


A large volume excimer laser, HERCULES, has been successfully applied as pump for a soft X-ray plasma source. The laser pulse duration has been varied from the natural value of 120 ns down to 10 ns, reaching different emission spectra from the plasma which have resulted to be optimum for different applications of the plasma source itself. Some experimental results on the applications of the source to different fields (X-ray microscopy, radio-biology, X-ray micro-lithography, basic plasma physics research) are presented; the choice of the best laser parameters in relation to the applications of the plasma source are also discussed.
Original languageEnglish
Pages (from-to)138 - 151
Number of pages14
JournalProceedings of SPIE - The International Society for Optical Engineering
Publication statusPublished - 1999
Externally publishedYes


All Science Journal Classification (ASJC) codes

  • Electrical and Electronic Engineering
  • Condensed Matter Physics

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