Study of thin films tin oxide chemical sensors created by laser-CVD and PLD techniques

Antonino Santoni, Jan Lančok, Michele Pensa, Filip Vysloužil, Miroslav Jelínek, Ivano Menicucci, Vladimír Myslík

Research output: Contribution to conferencePaper

Abstract

Tin oxide thin films based chemical sensors have been developed by means of laser induced chemical vapor deposition (L-CVD) and pulsed laser deposition (PLD) methods. The chemical composition of sensors was studied by XPS. By these two methods the tin oxide films were deposited at identical chemical chips and the sensitivity to hydrogen was measured and compared. An improvement of the sensitivity by using noble metal catalysts was observed. In addition, the possibility of detection CO, CH4, SO2, NO2and N2O gasses on the films deposited by L-CVD technique and to alcohol vapor on the films deposited by PLD was studied.
Original languageEnglish
DOIs
Publication statusPublished - 2002
Externally publishedYes
EventALT '01 International Conference on 'Advanced Laser Technologies - , Unknown
Duration: 1 Jan 2002 → …

Conference

ConferenceALT '01 International Conference on 'Advanced Laser Technologies
CountryUnknown
Period1/1/02 → …

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All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

Cite this

Santoni, A., Lančok, J., Pensa, M., Vysloužil, F., Jelínek, M., Menicucci, I., & Myslík, V. (2002). Study of thin films tin oxide chemical sensors created by laser-CVD and PLD techniques. Paper presented at ALT '01 International Conference on 'Advanced Laser Technologies, Unknown. https://doi.org/10.1117/12.478625