Synthesis of epitaxial BaZrO

R.B. Mos, M.S. Gabor, M. Nasui, T. Petrisor Jr., C. Badea, A Rufoloni, L. Ciontea, T. Petrisor

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11 Citations (Scopus)


This work reports on the low temperature preparation and characterization of BaZrO3(BZO) epitaxial thin films by chemical solution deposition (CSD). The X-ray θ-2θ scan and φ-scan measurements have demonstrated that the BZO films exhibit cube-on-cube epitaxy on (100) MgO substrates, with the full width at half maximum (FWHM) for the ω-scan and φ-scan of 0.35° and 0.46°, respectively. The SEM and AFM analyses revealed that the morphology of the films is strongly correlated with annealing temperature. The root mean square roughness for the film annealed at 600 °C is 3.63 nm, while for the film grown at 1000 °C is 5.25 nm. © 2009 Elsevier B.V. All rights reserved.
Original languageEnglish
Pages (from-to)4714 - 4717
Number of pages4
JournalThin Solid Films
Issue number16
Publication statusPublished - 1 Jun 2010
Externally publishedYes


All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry

Cite this

Mos, R. B., Gabor, M. S., Nasui, M., Petrisor Jr., T., Badea, C., Rufoloni, A., ... Petrisor, T. (2010). Synthesis of epitaxial BaZrO. Thin Solid Films, 518(16), 4714 - 4717.