Temperature effect on the reconstruction of Sb/Si(001) interface studied by high resolution core level spectroscopy and RHEED analysis

P. De Padova, R. Larciprete, C. Quaresima, A. Reginelli, P. Perfetti

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Abstract

The adsorption of three monolayers (3 MLs) of Sb at -120 °C on the Si(001)c(4×2) surface and the subsequent annealing up to 650 °C were followed by high resolution core level spectroscopy and RHEED analysis. By relating the electron diffraction patterns to the Si2p and Sb4d core level spectra measured after each annealing cycle, it was possible to monitor the evolution of the Sb/Si interface structure up to the achievement of a diffuse (2×1) reconstruction. Even after the annealing to 650 °C, the quality of the surface reconstruction remained poor, as attested by the RHEED pattern, by the intensity of the Si2p surface component and by the broadening of the Sb4d lineshape.
Original languageEnglish
Pages (from-to)214 - 219
Number of pages6
JournalApplied Surface Science
Volume166
Issue number1
DOIs
Publication statusPublished - 9 Oct 2000
Externally publishedYes

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All Science Journal Classification (ASJC) codes

  • Surfaces, Coatings and Films

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