Texture analysis of LiF thin films evaporated onto amorphous substrates at different temperatures

P.E. Di Nunzio, L. Fornarini, S. Martelli, R.M. Montereali

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Abstract

Polycrystalline thin LiF films thermally evaporated on amorphous substrates show different crystallite orientations depending on the substrate temperature during evaporation. The recording of direct diffraction pole figure shows that the LiF crystallites present a single crystal texture, which can be described as a 〈522〉 [uvw] texture for high temperature deposition (250 to 300 °C) and as 〈16 9 7〉 [uvw] texture for low temperature (room temperature) substrates. Scanning electron microscopy shows the presence of a globular film structure both for high and low temperature depositions with an average grain size of about 200 to 250 and 130 to 150 nm for high and low temperature evaporations, respectively. By rising the deposition temperature the 〈100〉 LiF crystallographic direction approaches the normal to the substrate plane with an increase of the film refractive index.
Original languageEnglish
Pages (from-to)747 - 756
Number of pages10
JournalPhysica Status Solidi (A) Applied Research
Volume164
Issue number2
Publication statusPublished - Dec 1997
Externally publishedYes

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All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics

Cite this

Di Nunzio, P. E., Fornarini, L., Martelli, S., & Montereali, R. M. (1997). Texture analysis of LiF thin films evaporated onto amorphous substrates at different temperatures. Physica Status Solidi (A) Applied Research, 164(2), 747 - 756.