The determination of the efficiency of energy dispersive X-ray spectrometers by a new reference material

Marco Alvisi, Markus Blome, Michael Griepentrog, Vasile-Dan Hodoroaba, Peter Karduck, Marco Mostert, Michele Nacucchi, Mathias Procop, Martin Rohde, Frank Scholze, Peter Statham, Ralf Terborg, Jean-Francois Thiot

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Abstract

A calibration procedure for the detection efficiency of energy dispersive X-ray spectrometers (EDS) used in combination with scanning electron microscopy (SEM) for standardless electron probe microanalysis (EPMA) is presented. The procedure is based on the comparison of X-ray spectra from a reference material (RM) measured with the EDS to be calibrated and a reference EDS. The RM is certified by the line intensities in the X-ray spectrum recorded with a reference EDS and by its composition. The calibration of the reference EDS is performed using synchrotron radiation at the radiometry laboratory of the Physikalisch-Technische Bundesanstalt. Measurement of RM spectra and comparison of the specified line intensities enables a rapid efficiency calibration on most SEMs. The article reports on studies to prepare such a RM and on EDS calibration and proposes a methodology that could be implemented in current spectrometer software to enable the calibration with a minimum of operator assistance. © Microscopy Society of America 2006.
Original languageEnglish
Pages (from-to)406 - 415
Number of pages10
JournalMicroscopy and Microanalysis
Volume12
Issue number5
DOIs
Publication statusPublished - Oct 2006
Externally publishedYes

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All Science Journal Classification (ASJC) codes

  • Instrumentation

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