Thin-film bulk-acoustic-resonator gas sensor functionalized with a nanocomposite Langmuir-Blodgett layer of carbon nanotubes

Michele Penza, Patricia Aversa, Gennaro Cassano, Domenico Suriano, Wojtek Wlodarski, Massimiliano Benetti, Domenico Cannatà, Fabio Di Pietrantonio, Enrico Verona

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Abstract

A thin-film bulk acoustic resonator (TFBAR) based on a vibrating membrane of AlN/Si3N4has been fabricated onto a silicon substrate and functionally characterized as gas sensor at a resonating frequency of 1.045 GHz. This novel TFBAR-based gas sensor has been functionalized by a sensing nanocomposite layer, prepared by a Langmuir-Blodgett (LB) technique, of single-walled carbon nanotubes (SWCNTs) embedded in a host matrix of organic material of cadmium arachidate. High-performance gas detection at room temperature of a SWCNT-coated TFBAR sensor has been reported. The sensing device exhibits high sensitivity (e.g., acetone: 12 kHz/ppm; ethylacetate: 17.3 kHz/ ppm), fast response (within 2-3 min), slow reversibility (within 1 h), and good repeatability (≤5% variation) of response toward tested organic vapors of acetone, ethylacetate, and toluene. © 2008 IEEE.
Original languageEnglish
Pages (from-to)1237 - 1243
Number of pages7
JournalIEEE Transactions on Electron Devices
Volume55
Issue number5
DOIs
Publication statusPublished - May 2008
Externally publishedYes

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All Science Journal Classification (ASJC) codes

  • Electrical and Electronic Engineering
  • Physics and Astronomy (miscellaneous)

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