Thin film bulk acoustic resonator vapor sensors with single-walled carbon nanotubes-based nanocomposite layer

M. Penza, G. Cassano, P. Aversa, D. Suriano, E. Verona, M. Benetti, D. Cannatà, F. Di Pietrantonio, W. Wlodarski

Research output: Contribution to conferencePaper

1 Citation (Scopus)

Abstract

We demonstrate the successful operation of a chemical microsensor based on Thin Film Bulk Acoustic Resonator (TFBAR) for organic vapor detection at room temperature. The TFBAR consists of a vibrating membrane of AIN/SI 3N4 fabricated on silicon substrate and resonating at the frequency of 1.045 GHz. Using a nanocomposite layer based on Single-Walled Carbon Nanotubes (SWCNTs) and prepared by the Langmuir-Blodgett technique onto the TFBAR device as highly-sensitive nanomaterial, the sensing performance of TFBAR sensor has been evaluated both as a passive device by a network analyzer with phase and insertion loss responses, and as oscillator with frequency response. The vapor sensing characteristics of SWCNTs-based TFBAR sensor are presented illustrating interesting results. © 2007 IEEE.
Original languageEnglish
DOIs
Publication statusPublished - 2007
Externally publishedYes
Event6th IEEE Conference on SENSORS, IEEE SENSORS 2007 - , United States
Duration: 1 Jan 2007 → …

Conference

Conference6th IEEE Conference on SENSORS, IEEE SENSORS 2007
CountryUnited States
Period1/1/07 → …

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All Science Journal Classification (ASJC) codes

  • Engineering (miscellaneous)
  • Electrical and Electronic Engineering

Cite this

Penza, M., Cassano, G., Aversa, P., Suriano, D., Verona, E., Benetti, M., ... Wlodarski, W. (2007). Thin film bulk acoustic resonator vapor sensors with single-walled carbon nanotubes-based nanocomposite layer. Paper presented at 6th IEEE Conference on SENSORS, IEEE SENSORS 2007, United States. https://doi.org/10.1109/ICSENS.2007.4388367