Wide angle x-ray diffraction (WAXS) characterisation of nanoscale silicon particles produced by laser synthesis from silane gas

E. Borsella, S. Botti, M.C. Cesile, P.E. Di Nunzio, S. Martelli, A. Nesterenko

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Abstract

Silicon nanoparticles have been produced by means of laser synthesis from silane gas. The average size and size distribution of the particle can be controlled by the synthesis parameters. To optimise the process, in order to reduce the particle size, a wide angle x-ray diffraction (WAXS) investigation method has been developed to rapidly and easily characterise the produced powder batches. The method is based on a Monte Carlo interference function (MIF) fitting of the experimental peaks. The results of the application of the MIF procedure on powder batches with different particle sizes are presented and compared with Brunauer-Emmett-Teller specific surface measurements and transmission electron microscopy.
Original languageEnglish
Pages (from-to)37 - 42
Number of pages6
JournalMaterials Science Forum
Volume195
Publication statusPublished - 1995
Externally publishedYes

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All Science Journal Classification (ASJC) codes

  • Materials Science(all)

Cite this

Borsella, E., Botti, S., Cesile, M. C., Di Nunzio, P. E., Martelli, S., & Nesterenko, A. (1995). Wide angle x-ray diffraction (WAXS) characterisation of nanoscale silicon particles produced by laser synthesis from silane gas. Materials Science Forum, 195, 37 - 42.