ZnO nanowires strips growth: Template reliability and morphology study

M. Pea, L. Maiolo, R. Pilloton, A. Rinaldi, R. Araneo, E. Giovine, A. Orsini, A. Notargiacomo

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Abstract

In this work we report on hydrothermal growth of ZnO nanostructures obtained by using strip-shaped resist templates made by electron beam lithography, with particular focus on: (i) the effects of materials used and processing on the template adhesion and its stability during wet growth; (ii) the influence of the template pattern dimensions on the nanowires morphology. Templates made of patterned films with methylmethacrylate-methacrylic acid copolymer showed greater adhesion and stability with respect to the commonly used poly (methylmethacrylate) electron resist or to the use of thin adhesion-promoter photoresist layers. The growth of nanowires in strip-shaped methyl methacrylate-methacrylic acid copolymer templates has been investigated using typical hydrothermal growth parameters and a marked dependence of nanowires length and diameter has been found on the template size for strips narrower than about 2 μm. © 2014 Elsevier B.V. All rights reserved.
Original languageEnglish
Pages (from-to)147 - 152
Number of pages6
JournalMicroelectronic Engineering
Volume121
DOIs
Publication statusPublished - 1 Jun 2014
Externally publishedYes

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All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Electrical and Electronic Engineering

Cite this

Pea, M., Maiolo, L., Pilloton, R., Rinaldi, A., Araneo, R., Giovine, E., ... Notargiacomo, A. (2014). ZnO nanowires strips growth: Template reliability and morphology study. Microelectronic Engineering, 121, 147 - 152. https://doi.org/10.1016/j.mee.2014.04.045